Fundamental research for a new confocal line X‐ray spectrometer
نویسندگان
چکیده
Confocal X-ray fluorescence (XRF) spectrometry can be used to perform three-dimensional elemental analysis, which is impossible using general micro XRF without any collimating optics in the detection channel. In this study, we designed, for first time, a new confocal line (C-L-XRF) system that obtain information of larger area and higher intensity analysis than conventional point (C-P-XRF) analysis. We evaluate basic performance C-L-XRF, such as horizontal depth spatial resolutions. identified resolution C-L-XRF directions approximately 2.9 2.6 times those C-P-XRF. However, it possible an 33 C-P-XRF intensity. expected effective analyzing wide-area samples layered samples.
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ژورنال
عنوان ژورنال: X-Ray Spectrometry
سال: 2021
ISSN: ['1097-4539', '0049-8246']
DOI: https://doi.org/10.1002/xrs.3218